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To: Czechsinthemail who wrote (14467)2/9/1998 2:17:00 PM
From: Yakov Lurye  Respond to of 25960
 
Re: Canon PR; is throughput increase related to CYMER laser?

1) White Oak press release does not contain any information about technological breakthroughs, Canon had a similar announcement about White Oaks early in August. They are using series 5000 laser, it is not the new laser CYMER will be introducing next Q. Good news is that Canon seems to be on schedule, no problems with their steppers.

2)The way I understand it, improvements in pulse stability or energy open an opportunity to improve stepper/scanner productivity. Akins talked about it during the CC explaining the need for new lasers. To have high throughput at .25 or below, one needs both a powerful KrF laser source and matching improvements in stepper/ scanner technology.

Canon offers matching i-line steppers that have same throughput as KrF stepper, although probably for non-critical layers.