To: Andrew Q. Viet who wrote (951 ) 2/18/1998 9:00:00 PM From: Maya Respond to of 1779
More relevant news: KLA-Tencor Expands Technology Portfolio Through Acquisition of Nanopro GmbH Advanced interferometric techniques to be focused on semiconductor wafer manufacturing applications SAN JOSE, Calif.--(BUSINESS WIRE)--Feb. 18, 1998-- KLA-Tencor Corp. (NASDAQ:KLAC - news) today announced the acquisition of Nanopro GmbH (Freiburg, Germany), a privately-held company specializing in the development of advanced interferometric technology for use in the measurement of semiconductor wafer shape and thickness. Critical for quality control during wafer manufacturing, wafer shape measurements are also used by manufacturers of integrated circuits to monitor incoming wafer quality. The acquisition will extend KLA-Tencor's existing technology portfolio for measurement of surface topography, which includes stylus profiling and laser-based stress measurement. Under the terms of the agreement, KLA-Tencor will create a surface metrology research and development center in Freiburg, chartered with developing tools incorporating this critical technology. Dieter Muller, former president of Nanopro, will become director of the new R&D center, reporting to Dr. Stan Yarbro, vice president and general manager of the surface metrology division of KLA-Tencor. ''The demands of advanced semiconductor manufacturing continue to push technical specifications in all fabrication areas, including wafer flatness. New technologies, with the increased lateral and vertical resolution to meet the stringent flatness requirements, will be critical to ensure precise measurement of wafer geometries for the coming generation of devices,'' said Yarbro. ''The interferometric methods Nanopro has developed, working in conjunction with a major wafer manufacturer, allow improved resolution over a surface area ten times as small as that which is currently available.'' In addition to its surface metrology products, KLA-Tencor also markets the Surfscan SP1 inspection system for the detection of defects and contaminants during wafer manufacturing. ''In the 18 months since its introduction, the SP1 has achieved wide acceptance as an inspection tool for wafer manufacturers. Adding the Nanopro technology to our portfolio will help us expand our offering in this growing marketplace and deliver the tools needed to meet advanced manufacturing requirements,'' Yarbro noted. About KLA-Tencor: KLA-Tencor is the world leader in yield management and process control solutions for semiconductor manufacturing and related industries. An S&P 500 company, KLA-Tencor is traded on the Nasdaq National Market under the symbol KLAC. Company headquarters are located in San Jose, Calif., with sales offices worldwide. Additional information about the company is available on the Internet at www.kla-tencor.com. Contact: KLA-Tencor Corporation Roberta Emerson, 408/875-3000, ext. 7037 or MCA, Inc. Chris Castillo, 650/968-8900