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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: TideGlider who wrote (14930)2/21/1998 11:11:00 PM
From: FJB  Read Replies (1) | Respond to of 25960
 
RE:Their laser seems to be the only one (as I seem to understand)
that enables 0.18 micron at KrF wavelength (248nm) due to lesser linewidth.


As far as I know, this totally wrong.

Bob



To: TideGlider who wrote (14930)2/22/1998 1:03:00 AM
From: FJB  Read Replies (2) | Respond to of 25960
 
TG,

After giving this some more thought and referring to the literature, the 0.2pm difference in spectral bandwith between the LP and Cymer lasers does enable improved resolution and DOF through the use of a higher NA lenses. It does not mean that the Cymer 5000 offering is not capable of 0.18um resolutions, but the LP laser is better suited by virtue of its better bandwith number. So in retrospect, the 5010 bandwith-improved model being introduced in Q2 seems to be a response to this.

I apologize for the outright dismissal before. And now, back to the hockey game...

Bob

PS I'm just a layperson in this area, so you experts out there please correct anything that may be incorrect. Got a textbook on optics coming in the mail, so I should be able to improve my knowledge in this area time permitting.