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To: Lord who wrote (1851)2/24/1998 5:41:00 PM
From: Doug Skrypek  Respond to of 5867
 
300mm tools are:

-"876" 300mm CMP tool in Beta. Possibly shipped to SEMTECH.

-"PWS-300 Precision Wafer Shaper", with AcuFlat wafer thickness metrology to control the system. Several have been shipped to Japanese and U.S. customers.

Any other issues please ask them on the IPEC thread.