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To: FJB who wrote (830)3/2/1998 11:07:00 PM
From: Andrew Vance  Read Replies (3) | Respond to of 1305
 
You are on target and you have uncovered some of my erroneous rationale about VECO. I looked over the list and see a need for most of the equipment measured. The tooling is one of a kind or 2-3 of a kind and not multiple systems per wafer fab like AMAT etchers, NVLS deposition or ASMLF steppers. But a good metrology niche.

I am changing my attitude towards VECO by the day.

Andrew