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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?

To: Tulvio Durand who wrote (15339)	3/3/1998 3:42:00 PM
From: FJB	Respond to of 25960

Tulvio, Yes, more power, better dosage control, better bandwith and EVERY other parameter important to microlithography has been improved. Seriously. Important points: from the Q4 CC I'll keep my remarks here principally to the Orion, but the Orion is a 2 kilohertz 20 watt average-power machine,... from the Q3 CC those two critical technologies go by the name of pulse-stretching and also multi-kilohertz operation. Pulse-stretching allows one to tailor the pulse of the laser to achieve optimal lifetime for the optics train by minimizing damage to optical material. And multi-kilohertz operation of course provides extra throughput, and extra precision in dosage control for both steppers and especially for the next-generation of scanners. There is a useful table on this page which summarizes performance parameters and what they effect. Find the table called, Table 1 Laser Performance Parameter (and their impact on stepper/scanner) measured during tests. cymer.com Bob