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To: Candle stick who wrote (15430)3/5/1998 10:07:00 AM
From: FJB  Read Replies (1) | Respond to of 25960
 
"Our X-ray lithography program, which utilizes these same Britelight
laser light sources, also advanced during 1997," Martinez continued.
"At present, we are continuing to scale-up our system to higher power
and efficiency levels with a target of attaining those commensurate
with commercially viable semiconductor manufacturing throughput.

"Once we achieve this, we look to reach the next milestone of the
program, which is the integration of our X-ray source with an X-ray
stepper to create a functional X-ray lithography workstation
that can
be used by semiconductor manufacturers to develop their advanced
manufacturing processes. Subsequent milestones include further scaling
to higher production rates in future years.


Hmmm. Never been used in a functional X-Ray stepper. I'll take a synchotron anyday.