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To: BillyG who wrote (15474)3/5/1998 4:45:00 PM
From: FJB  Read Replies (2) | Respond to of 25960
 
I'm not sure. This is more a matter of semantics possibly. Because its not visible? But 248nm is already invisible so... You photolithographers out there, HEEELP!



To: BillyG who wrote (15474)3/5/1998 5:36:00 PM
From: Bookdon  Read Replies (1) | Respond to of 25960
 
X-ray lithography has gotten such a bad reputation for always being the "technology of the future" (and never of the present) that some want to avoid using the term x-ray. The EUV and "soft x-ray" regions of the spectrum really overlap. Some prefer to use Extreme Ultraviolet, rather than the older term "soft x-ray" (contrasting with shorter wavelengths of "hard x-ray").


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