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To: FJB who wrote (1441)	3/8/1998 11:19:00 AM
From: TI2, TechInvestorToo	Respond to of 2946

Its a lot more than software. The step and scanners simultaneously move both the wafer sage and the reticle stage (albeit the reticle stage moves 4x faster than the wafer stage to make up for reduction optics). The accurate and precise coordination of these stages is essential to system performance. The larger reticles mean that the payload that the system must move increases substanially and therefore the engineering challenges to move it accurately and precisely. Some believe that SVGL has a benefit vs the competition since the reticle is held vertically instead of horizontally. TI2