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To: TI2, TechInvestorToo who wrote (913)3/15/1998 8:02:00 PM
From: Crossy  Respond to of 1305
 
To all it may concern,
found a really nice article on the status-quo of the litho market in one of the more recent net publications:

Especially ASMLF situation vs. CANON is highlighted with a spice of AFC <G>--

sumnet.com

CROSSY



To: TI2, TechInvestorToo who wrote (913)3/18/1998 10:28:00 AM
From: Katherine Derbyshire  Read Replies (1) | Respond to of 1305
 
>>Is the following link relevant to the trickier materials for gate oxide at 100 nm
devices challenge? Seems so.
Thanks in advance,
TI2

Message 3674948;

Thanks for bringing that release to my attention-I hadn't seen it yet.

The Lucent work certainly lengthens the list of possible dielectric materials, and therefore improves the chance that an "ideal" dielectric will be found. On the other hand, materials that will work "well enough" are already known. The real challenge is in bringing these new materials to manufacturability, not in identifying compounds.

Katherine