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To: FJB who wrote (16139)	3/31/1998 9:20:00 AM
From: BillyG	Respond to of 25960

ASML Supplies Samsung With DUV Photolithography Tool for 300 mm Development VELDHOVEN, The Netherlands--(BUSINESS WIRE)--March 31, 1998-- Move is Part of ASML's ATLAS 300 mm Development Program to Provide the Semiconductor Market with High Productivity 300 mm Photolithography Tools ASML (ASM Lithography)(NASDAQ:ASMLF) today announced that it has demonstrated 300 mm aligned exposure capability and will supply a PAS 5500/300 PDT deep UV (DUV) photolithography system to Samsung Electronics, Seoul, Korea. The system, which was designed for processing 300 mm wafers, will be installed at Samsung's Kihung facility to further Samsung's development of 300 mm wafer process technology. The PAS 5500/300 PDT (Process Development Tool) is based on modifications to ASML's market-proven PAS 5500/300 series of DUV steppers, and was developed specifically for Samsung to be used in the company's 300 mm development program. The system incorporates a 248 nm excimer laser, and has shown imaging capability of 0.25-micron and below at 35 nm overlay on 300 mm wafers. The PAS 5500/300 PDT system is an example of ASML's widening efforts to provide the worldwide semiconductor market with high production photolithography tools for 300 mm wafer production. ASML has instituted these efforts under its Advanced Technology for Large Area Substrates (ATLAS) program, and plans to supply production 300 mm tooling from 1999 onward. "ASML created the ATLAS program to develop lithography tools for 300 mm production," said Dr. Richard George, director of step & scan marketing and marketing director for ASML's 300 mm program. "With the acceptance of the PAS 5500/300 PDT by Samsung, a major force in 300 mm technology development, ASML has taken a significant step toward the program's goal of supplying high-volume, leading edge 300 mm lithography tooling." ASM Lithography (NASDAQ:ASMLF)(Amsterdam Stock Exchange:ASML) is a world leader in photolithography with an installed base of more than 1,000 systems at customer sites around the world. The company, recognized by Dataquest as the No. 2 supplier of steppers in the world, had 1997 revenues of $889 million. ASML is headquartered in Veldhoven, The Netherlands, with a U.S. operations center in Tempe, Ariz., and regional sales and service facilities in Korea, Taiwan, Japan and Singapore. -0- "Safe Harbor" Statement under the Private Securities Litigation Reform Act of 1995: Except for historical information, the matters discussed in this news release that may be considered forward-looking statements may be subject to certain risks and uncertainties that could cause the actual results to differ materially from those projected, including uncertainties in the market, pricing competition, procurement and manufacturing efficiencies, and other risks detailed from time to time in reports filed by the company with the Securities and Exchange Commission. The company assumes no obligation to update the information in this release. --30--smm/sf* cmf/sf CONTACT: ASML/ASM Lithography Evert Polak, (31) 40-2303-537 (Vice President/Marketing/Veldhoven) Richard George, (31) 40-2303-335 (Director/Step & Scan Marketing/Veldhoven) Doug Marsh, 602/438-0559 (Vice President/Worldwide Sales/Tempe) Mark Bigelow, 602/414-2252 (Manager/Marketing Communications/Tempe) or Mathews & Clark Bob Climo, 408/736-1120 (Sunnyvale, Calif.) Ann Read, (44) 171-631-1606 (London)