To: Elroy Jetson who wrote (16199 ) 4/1/1998 4:45:00 PM From: BillyG Read Replies (1) | Respond to of 25960
Maybe there is some info leaking out of Semicon Europe, which is taking place this week.news.semiconductoronline.com <<Highlights of the technical program include: The Second Annual SEMI Productivity Forum-Taking the topic, "What Drives Companies to Performance Excellence," this forum included presentations from SGS-Thomson, on downtime reduction; from Siemens, on measures of overall fab productivity; and from Intel, on productivity management at Intel Ireland. Future Trends in Microlithography -Both wafer lithography and mask fabrication face major challenges with the impending transition to post-optical exposure methods. Presentations from ASML, on production lithography; Photronics, on mask making; and Leica, on mask metrology, highlighted these issues. A presentation from Germany's Fraunhofer Institute looked at the increasingly stringent requirements faced by package lithography. The Success of the European Semiconductor Equipment Assessment Initiative (SEA)-The initiative, supported by the European Commission's Esprit program, aims to bridge the gap between research and manufacturing through assessment and demonstration projects. Recent success stories include a multi-die approach to mixed function testing, in-line verification of multilayer structures with spectroscopic ellipsometry, and low damage implanted resist stripping. Meanwhile, lots of things were happening out on the show floor as well: ASM Lithography featured the company's new i-line step-and-scan system, and announced a new Special Applications division. >>Also, ASML targets "special applications" such as drive head manufacturing and micromachining....... news.semiconductoronline.com <<Worldwide, 80 percent of stepper sales go to mainstream IC fabrication-design rules of 0.45 micron and smaller. That leaves another 20 percent still unaccounted for, though. These non-mainstream markets include IC applications above 0.45 micron, thin film and magneto-resistive heads for disk drives, micromachining, and non-silicon substrates like GaAs. Tuesday at Semicon Europa, ASM Lithography (Veldhoven, The Netherlands) announced the formation of a new business division, ASML Special Applications, to pursue these market opportunities. >>