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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: FJB who wrote (16307)4/3/1998 1:04:00 PM
From: slipnsip  Read Replies (1) | Respond to of 25960
 
Buys coming in good chunks now. 10k 50k etc...... 23 1/8



To: FJB who wrote (16307)4/3/1998 1:41:00 PM
From: BillyG  Read Replies (1) | Respond to of 25960
 
Reliability Studies of 1kHz KrF Excimer Lasers for DUV Lithography, from the CYMI web site.
cymer.com

<<A critical assumption in this calculation is that the chip maker follows the maintenance schedule prescribed by Cymer. If such maintenance is not performed, the reliability of the laser is significantly affected and the RAM analysis performed here becomes meaningless. Often, the chip maker is ill-prepared to handle such maintenance because the usage rate of the laser varies significantly and is tied to the usage of the stepper and to the chip makers requirements. Since most of the maintenance intervals of the modules in the laser are based on pulse count, the chip maker is unable to predict when a maintenance should be performed. To minimize the unpredictability of the maintenance schedule, Cymer has developed software in ELS-5000 that forewarns the chip maker about an impending maintenance before the maintenance limit is reached. The software estimates the usage rate of the laser and calculates when a particular module would require maintenance. If the time to maintain the module is less than 100 hours, a warning is generated to prepare the chip maker for the impending maintenance of that module. This warning is expected to minimize occurrences of missed maintenance schedule.

4. CONCLUSION

The above calculations is our first estimate of the MPBF and MTBF of ELS-5000. We estimate that the MPBF and MTBF of the laser is 580 million pulses and 1270 hours. The laser's uptime is better than 99%. The use of FRACAS by Cymer engineering, manufacturing and field service resulted in a rapid maturity of the new ELS-5000 laser product. As the chip makers begin using the lasers, FRACAS will ensure identification and closure of problems observed by them to minimize their downtime. >>