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To: LemurHouse who wrote (477)	4/16/1998 11:49:00 AM
From: Nick Michell	Read Replies (1) \| Respond to of 582

More from Lambda: (From the April 13, 1998 Issue of Electronic News) Lambda Physik received a $6.7 million order for its Lambda 4000 excimer lasers from Japan Steel Works. These lasers, to be delivered within 1998, will be integrated into systems made by Japan Steel Works for thin-film transistor (TFT) annealing in the production of active-matrix liquid crystal displays (AMLCDs). This is the largest single order in the company's history, and also includes beam homogenization and line generation optics produced for Lambda Physik by Microlas GmbH. Lambda Physik also revealed that it now offers an argon fluoride (ArF) excimer laser series that meets the demands of all 193-nanometer production microlithography systems. The series includes the new NovaLine Litho 193-0.7, an ultra-narrow-bandwidth source designed for refractive and catadioptric lithography systems. This is complemented by the NovaLine Litho 193-25, intended for use in catadioptric scanners. The bandwidth of the NovaLine Litho 193-0.7 is 0.35pm, which Lambda Physik claims is the smallest ever achieved in an industrial ArF laser for deep-ultraviolet lithography. Pricing for the new system was not available at press time.