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Technology Stocks : Speedfam [SFAM] Lovers Unite ! -- Ignore unavailable to you. Want to Upgrade?

To: Nick Michell who wrote (2944)	4/19/1998 5:52:00 PM
From: Mr. Sam	Respond to of 3736

<<Any thoughts on how SpeedFam's product compares [to AMAT's Mirra] for [W polishing]. I was particularly interested in this statement: "The Mirra's design uses Applied's in situ rate monitor technology, called ISRM....">> My opinion is that the Auriga is a superior product for oxide and tungsten applications but that the Mirra is improving steadily and has the superior marketing muscle of AMAT behind it. Both products will share the market for the next few years. As for the endpoint claims, there are a number of endpoint methods that work very easily with tungsten applications including AMAT's ISRM product. SFAM's endpoint system also works with tungsten, as do other commercially available products. With tungsten polishing, a few hundred angstroms of oxide thickness either way is generally not critical and selectivities of tungsten slurry systems to oxide are generally very high, so endpoint differences are not significant competitive advantages, as they can be for applications such as shallow trench isolation, for example.