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To: Ian@SI who wrote (361)6/16/1998 10:50:00 AM
From: kinkblot  Read Replies (1) | Respond to of 1138
 
"300 mm Wafers: Implications To Fab Architecture" in Semiconductor Int'l June 98:
semiconductor.net

Article discusses use of FOUP (Front Opening Unified Pod) minienvironments vs. 300mm cassettes and implications wrt fab architecture. Brooks VCE 5 vacuum elevators are available in various models to provide a standard interface between process tools and either transport system. WT