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To: Tulvio Durand who wrote (16853)4/22/1998 11:17:00 AM
From: TI2, TechInvestorToo  Respond to of 25960
 
I recall that a major microP company was funding some basic research with a local govt lab (Lawrence Livermore) that used linac (linear accelerators) as a source for xrays. It was purported to be a cheaper/smaller approach than the big ring in New York. Any comments based on your previous posts? Sorry,can't remember if the referenced xrays were soft (EUV) type or not. The EUV term did not exist then.
Thanks
TI2

PS : Robert/ thread, Any references that Intel/Sematech/CYMI tied together on EUV development program?