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To: Ginko who wrote (17063)	4/24/1998 1:43:00 PM
From: Tulvio Durand	Respond to of 25960

Laser, chamber, and gas have to be replaced at intervals of 4, 3, and 10(?) times per year, respectively. The laser replacement is $5,000, and I don't know the replacement cost for the other two. Altogether, I seem to recall from a conference last year, $50,000/yr/unit as an average maintenance cost, which, BTW, is about 10X more than for a comparable Mercury-bulb equipped unit. Noted from yesterday's CC is that the life of the newer 5010 DUV laser is about 50% greater (4 to 4.5 billion pulses) than its 5000 predecessor (3 billion pulses). Also from the CC, the Orion achieves 20W power by doubling the pulse repetition rate. I interpret the latter to mean that the laser's life will be halved relative to the 5010, making it roughly comparable to the life of the 5000. Also, based on similar reasoning, gas and chambers may have to be replaced at 2X greater frequency than the 5000. Thus the 5010 is less costly to maintain and promises greater throughput than the 5000. The Orion will be more costly to maintain than the 5010, but its throughput capability could be as much as twice that of the 5010, making for lower overall cost of ownership compared to either the 5000 or 5010. One can see the dilemma faced by the chipmaker in deciding which DUV laser to order with his next stepper/scanner. If he opts for the Orion, it may add one year to delivery compared to getting the 5000. The 5010 may add 6 months to delivery compared to getting the 5000. And time means losing market share. Tulvio