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To: SemiBull who wrote (1637)4/24/1998 11:03:00 AM
From: David Aegis  Respond to of 2946
 
Semibull and All--Thanks for helping clarify the Micrascan/.18 micron debate. --David



To: SemiBull who wrote (1637)4/24/1998 11:22:00 AM
From: Juniper  Read Replies (1) | Respond to of 2946
 
Interesting article, although SVGI is misrepresented - probably since it's the smallest player.

Silicon Valley Group, whose stock is down by 12 percent for the year, has already reached the 0.25-micron line width by specially tuning its existing machines that use conventional light. The company is about to add its own laser-based line of deep ultraviolet machines, which will eventually permit Intel to go to line widths of 0.18 or even finer


As probably most of the threaders are aware, SVGL Micrascan IIIs are strictly laser based. As of a year and a half ago they added that laser based line of DUV equipment, and I would be pretty sure that the MSIIIs are already allowing Intel to go to .18 u line widths in non-production lines. Oh well.