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To: Juniper who wrote (1641)	4/27/1998 11:02:00 AM
From: David Aegis	Respond to of 2946

<Speculation?> A discussion of ISI and SVGL/MIT's efforts in EUV is contained in the following article: techweb.cmp.com I don't know what Nikon, Canon or ASMLF are doing for R&D in this area, but I think we're at least a few years away from EUV. Art Z. at UTEK has always had as strategy to bypass the DUV stage and reposition UTEK as an EUV supplier. UTEK does have a core competency in reflective optics. That's one of the main reasons why their I-line steppers are so reliable. Art also probably wants to keep ISI away from the competition. --David