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To: UPAL who wrote (502)4/30/1998 11:29:00 AM
From: Nick Michell  Read Replies (1) | Respond to of 582
 
Samsung, Hitachi plan to start 256-Mbit production in early '99

pubs.cmpnet.com

From the article:

Both Samsung and Hitachi plan to make the 256-MBit chips with
248-nanometer deep-UV lithography processes, which are currently
being used to fabricate 64-Mbit DRAMs. The 248-nm exposure tools
will produce 0.18-micron device feature sizes using new phase-shift
masks.