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To: FJB who wrote (17386)	5/7/1998 12:15:00 AM
From: Starlight	Read Replies (1) \| Respond to of 25960

Bob - Sanders, a Lockheed Martin Co., is working on it, along with SAL, Science Research Lab and the Univ. of Wisconsin's Center for XRL. Also JMAR is working on it. (All are using Point Source, but SRL is working on a dense plasma source and JMAR on a laser plasma source.) They're all still in development. Betty

To: FJB who wrote (17386)	5/7/1998 9:59:00 AM
From: Katherine Derbyshire	Read Replies (3) \| Respond to of 25960

Don't get too smug. EUV point sources aren't a done deal, either, and synchrotrons are cheap compared to something like Lawrence Berkeley's Advanced Light Source. A friend of mine who did classified EUV research for a while suggests that making one that meets litho-type (as opposed to military) requirements is non-trivial. In fact, the best play on post-optical litho may be the various defense companies (Grummann, Lockheed, Hughes, etc.). Maybe Star Wars isn't completely useless after all? Katherine