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To: FJB who wrote (17409)	5/7/1998 10:42:00 PM
From: John Bloxom	Read Replies (1) \| Respond to of 25960

Isn't it the case that quantum mechanics problems present pretty quickly at sub-DUV geometries? I am certain that I have read that that is so, and that ultimately it is the rock upon which Moore's law will founder. Regards, John

To: FJB who wrote (17409)	5/7/1998 10:59:00 PM
From: Backfill	Respond to of 25960

Post optical lithography is in it's infancy R&D People are just now experimenting with making masks. Tools are being prototyped. Of course DUV (<= 193) still has allot of challenges ahead i.e., Resists, and Reticles. Lithography Engineers walk around pretty puzzled these days trying to find the light that will make them successful with respect to half sizing geometries every 18 months. Reticle manufacturers are resisting the eventual need to upgrade equipment...Lots of ambiguity