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To: Paul Engel who wrote (55371)5/11/1998 1:00:00 PM
From: Paul Dieterich  Read Replies (1) | Respond to of 186894
 
Paul,

Thanks for your input:

..For their next generation 0.18 micron process, the KrF Excimer laser source will most likely be the source - as used on the MicraScan III.

I would have assumed that any other chip manufacturer would be buying excimer-powered steppers/scanners by now, in preperation for the move to .18 and .15 photolith. With Intel, however, the issue is unclear, in view of how Intel puts so much emphasis on fab standardization, and their success with the older SVGI technology.

Regards,

--PD


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