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To: curtis fincher who wrote (997)5/27/1998 2:02:00 PM
From: Katherine Derbyshire  Read Replies (1) | Respond to of 1305
 
>>Most likely
will be that many 193 resist will find their way into use as 248
substitutes and eventually be used for both. <<

I wouldn't bet on that. Most polymers have significantly different absorption characteristics at 193 nm vs 248 nm. That's the reason why new resists are needed in the first place.

Katherine