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To: Gottfried who wrote (3511)6/5/1998 11:46:00 AM
From: appro  Read Replies (1) | Respond to of 9256
 
GM, Thanks! I am still learning how the pieces fit together. I see these focused beams can be used in direct deposition of thin film on silicon as in:
>>We have developed low energy focused ion beam direct deposition as a new technique for fabricating patterned thin film directly on the substrate. In this paper, we report the magneto resistance (MR) characteristics of [Co/Cu] multilayers containing thin Co and Cu layers fabricated by focused ion beam direct deposition method. Expected giant values of MR were obtained. Experimental results show high quality structures of the multilayers fabricated by direct deposition such as precisely controlled thickness and atomic order flatness. koken-db.kogaku.kyoto-u.ac.jp