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To: Backfill who wrote (14418)	6/15/1998 11:20:00 AM
From: Andrew Vance	Respond to of 17305

AV--Older technologies are where I used recycling. Depending on the type of contamination, it may be possible to refilter and reuse as described in the first post. Hopefully improved stability of DUV resist chemicals and as it becomes more mainstream, will help reduce the proce of these products along with making it less sensitive to environmental controls and forms of contamination that might not necessarily be filtered out. I spoke at greater length on my field of expertise but it does not necessarily mean that recycling of DUV resists are feasible today. It is just a set of examples to better understand where the comment "10% of the existing semiconductor process" might really imply. Andrew