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To: Katherine Derbyshire who wrote (2607)7/27/1998 9:35:00 AM
From: Carl Mays  Read Replies (1) | Respond to of 3696
 
Katherine,

I was told at Semicon that P-GILD only works on bare silicon. Once topography is involved, the doping properties lose uniformity and control. This is viewed as a significant problem that is not easily overcome.