SI
SI
discoversearch

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor.  We ask that you disable ad blocking while on Silicon Investor in the best interests of our community.  If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.
Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?


To: Carl R. who wrote (18907)8/1/1998 12:32:00 PM
From: TI2, TechInvestorToo  Respond to of 25960
 
OT- FIB focussed ion beam are also used to repair defects in photomasks. If a particle lands on a desired clear area of a mask, it can block the exposure/develop/etch of that area. One of KLAC (or AMAT-ORBOT) inspection tools find the defect and the location is recorded and used to locate it on a "zapping" tool that makes it go away. Zapping tools used be laser , but the higher resolution today demand the focussed ion beam approach.
TI2