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To: LLCF who wrote (1779)	8/4/1998 6:37:00 PM
From: FJB	Read Replies (2) \| Respond to of 2946

Very interesting article... Here are some highlights: SVG Lithography is developing an advanced step-and-scan lithography system that will be sold exclusively to Intel Corp. The new Micrascan-IIIx could give Intel a major boost into next-generation chips with 0.15-micron feature sizes. ... The neat thing about the new Micrascan-IIIx is that it will extend SVGL's deep-UV capabilities to the next-stage 0.15-micron line geometries with the same 248-nm wavelength excimer laser system that's being used today. ... Another advantage of the new Micrascan-IIIx, as well as with the current Micrascan-III-plus tools, der Torossian pointed out, was that very fine line geometries could be done through SVGL's own optics and without the need for extra phase shift masks. ... But the 50 machines that SVGL built last year was still enough to exceed the 30 step-and-scan tools produced by all its global competitors, said John Shamaly, vice president of marketing for the parent SVG. That growing capacity, however, could come in handy in a year or two when demand jumps significantly as chip makers shift rapidly to next-generation scanners. pubs.cmpnet.com