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To: Smilodon who wrote (3135)8/6/1998 8:24:00 PM
From: spiny norman  Read Replies (1) | Respond to of 3736
 
Archer, although I think you are right in general about front end recovering slower than back end, CMP may be the exception.

My understanding is that above .35 CMP is infrequently used, but that at finer geometries, CMP is necessary to get acceptable yields. I guess I'm saying that perhaps there isn't much installed CMP capacity to reuse yet, so CMP may be one front end area that holds up relatively well.

regards


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