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To: David Rosenthal who wrote (6775)	8/21/1998 9:02:00 AM
From: Katherine Derbyshire	Respond to of 10921

Yes, lithography would be something of an odd duck among AMAT's collection of single wafer vacuum processing tools. The combination makes more sense from a business/market share point of view (litho is the single biggest process in terms of dollars spent on it) than a technical one. Which may be why they haven't actually bought a litho company yet. There are significant benefits of integration between exposure tools and resist processing systems, which is part of why SVG has a track division. There are some benefits to tying resist deposition and resist removal systems together, which is why Eaton is making a big push in that direction. Synergies between litho and CMP, metal deposition, and other AMAT strengths are harder to find. Katherine