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To: Backfill who wrote (19212)8/31/1998 11:46:00 PM
From: Apple12  Respond to of 25960
 
I was not trying to endorse their product. It was the second time I used it free at the site. I was just posting it to give the board its results. I have never used it to make any investment decisions.



To: Backfill who wrote (19212)9/1/1998 4:59:00 PM
From: FJB  Respond to of 25960
 
FYI, apparently, TI used plain old 248nm steppers and advanced masks to make prototype 0.10æm parts:

Indeed, TI's lithography plan has become a critical issue in whether the
company can hit its 2001 target. To do it, it intends to use next-generation
193-nm lithography tools to pattern critical dimensions in 0.10-micron ICs.
TI researchers created prototypes of the 0.10-micron devices by using
existing 248-nm steppers and some optical tricks.

"The 193-nm systems are just now starting to become available and we
expect to have one shortly, but this will not be a system that is for use in a
full-flow [production] process, where you can pattern a reasonably large
die," said Robert Eklund, technology development manager involved in the
project at TI. He would not identify what lithography vendor would be
supplying TI's initial 193-nm deep ultraviolet tool. The company plans to
evaluate production systems next year.

"From everything we see now, we expect the tools to be there," added
Eklund, who saw no reason to believe the 0.10-micron technology will be
delayed. "The product plans for customers require it and we do not see any
barriers to being successful."

pubs.cmpnet.com