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To: Tom Swift who wrote (7040)9/28/1998 10:58:00 PM
From: Katherine Derbyshire  Read Replies (1) | Respond to of 10921
 
The dielectric constant (k) of SiO2 is about 4. To get the same capacitance in a smaller space, you need a better insulator, a high-k material. Materials under consideration include Ta2O5 (k~24) and (Ba,Sr)TiO3 (k~160). Both materials are very finicky about composition, particularly oxygen content, so you need a very stable, non-reactive electrode.

Some additional technical detail can be found at:
news.semiconductoronline.com
news.semiconductoronline.com
news.semiconductoronline.com

Katherine