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To: FJB who wrote (1873)	10/3/1998 12:51:00 PM
From: James Word	Read Replies (1) \| Respond to of 2946

Robert: "will they be able to achieve these types of resolutions with the original DUV steppers they have in place" If they don't have any money (I think that's fair to say about DRAM manufacturers) then that's really the only choice, although maybe not a desirable one. Most DRAM manufacturers are quite comfortable using phase shift reticles and off axis illumination to enhance resolution. Using PSM and OAI you can push I-line to around 0.25um and probably 248nm DUV to 0.15um. The main reason that the DRAM guys may want to go to scanners would probably not be CD control. It would probably be field size and higher NA (lower resolution). Its the MPU manufacturers that really need the scanners to control CDs. They don't have the luxury of using OAI and PSM. Yes, PSMs are expensive, but remember alot of the DRAM companies have their own mask development shops. Also, you only need a few critical level reticles to mass produce millions of chips since their volumes are so high and number of mask sets are so low. Yes, OPC at 0.18um seems to be a given and binary masks will still rule the day. Nobody outside of memory manufacturers is seriously considering PSM until maybe the 0.15 or 0.13 micron generation. James Word

To: FJB who wrote (1873)	10/9/1998 11:38:00 AM
From: Ian@SI	Read Replies (4) \| Respond to of 2946

Looks like the value funds have moved into SVGI. Does anyone know anything of: EQSF Advisers, Inc. (EIN 13-3354359); M.J. Whitman Advisers, Inc. (EIN 13-3686379); or Third Avenue Value Fund Collectively, they now have 13.11% of SVGI. -------------------------------------------------------------------------------- 1 NAME OF REPORTING PERSONS S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS EQSF Advisers, Inc. (EIN 13-3354359) -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 4 CITIZENSHIP OR PLACE OF ORGANIZATION New York Corporation -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 5 SOLE VOTING POWER 4,273,100 NUMBER OF ------------------------------------------------- ------------------------------------------------- EACH 7 SOLE DISPOSITIVE POWER REPORTING PERSON 4,273,100 ------------------------------------------------- ------------------------------------------------- WITH 8 SHARED DISPOSITIVE POWER None -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON 4,273,100 -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11) 11 13.11% -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 1 NAME OF REPORTING PERSONS S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS M.J. Whitman Advisers, Inc. (EIN 13-3686379) -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 5 SOLE VOTING POWER 632,284 NUMBER OF ------------------------------------------------- ------------------------------------------------- SHARES 6 SHARED VOTING POWER BENEFICIALLY OWNED BY None ------------------------------------------------- ------------------------------------------------- EACH 7 SOLE DISPOSITIVE POWER REPORTING PERSON 632,284 ------------------------------------------------- ------------------------------------------------- WITH 8 SHARED DISPOSITIVE POWER None -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON 632,284 -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- PERCENT OF CLASS REPRESENTED BY AMOUNT IN ROW (11) 11 1.94% -------------------------------------------------------------------------------- 1 NAME OF REPORTING PERSONS S.S. OR I.R.S. IDENTIFICATION NOS. OF ABOVE PERSONS Martin J. Whitman -------------------------------------------------------------------------------- -------------------------------------------------------------------------------- 3 SEC USE ONLY -------------------------------------------------------------------------------- ------------------------------------------------- EACH 7 SOLE DISPOSITIVE POWER REPORTING None (See Item 4) ------------------------------------------------- --------------------------------------------------------------------- 9 AGGREGATE AMOUNT BENEFICIALLY OWNED BY EACH REPORTING PERSON -0- (See Item 4) -------------------------------------------------------------------------------- ---------------------------------------------------------------------- -------------------------------------------------------------------------------- 12 TYPE OF REPORTING PERSON* IN Item 1. (a) Name of Issuer: Silicon Valley Group, Inc. (the "Issuer"). (b) Address of Issuer's Principal Executive Offices: 101 Metro Dr., Suite 400, San Jose, CA 95110 Item 2. (a) Name of Person Filing: This schedule is being jointly filed by EQSF Advisers, Inc. ("EQSF"), M.J. Whitman Advisers, Inc. ("MJWA") and Martin J. Whitman, the Chief Executive Officer of EQSF and MJWA and controlling person of EQSF and MJWA. (EQSF, MJWA and Martin J. Whitman are sometimes collectively referred to hereinafter as "Filer"). Attached hereto as an exhibit is a copy of the joint Schedule 13G filing agreement among the reporting persons. (b) Address of Principal Business Office: The address of the principal executive office of EQSF, MJWA and Mr. Whitman is: 767 Third Avenue, New York, New York 10017-2023. (c) Citizenship: The citizenship or place of organization of each of the reporting persons is as follows: EQSF New York State corporation. MJWA New York State corporation. Martin J. Whitman United States citizen. (d) Title of Class of Securities: Common Stock, $.01 par value per share. Item 4. Ownership. (a) & (b) EQSF beneficially owns 4,273,100 shares, or 13.11% of the class of securities of the issuer. MJWA beneficially owns 632,284 shares, or 1.94% of the class of securities of the issuer. (c) (i) EQSF: 4,273,100 MJWA: 632,284 (ii) Not applicable. (iii) EQSF: 4,273,100 MJWA: 632,284 (iv) Not applicable. Mr. Whitman disclaims beneficial ownership of all such shares. Item 5. Ownership of Five Percent or Less of a Class. Not applicable. Item 6. Ownership of More than Five Percent on Behalf of Another Person. Third Avenue Value Fund, an investment company registered under the Investment Company Act of 1940, has the right to receive dividends from, and the proceeds from the sale of 4,057,800 of the shares reported by EQSF; Third Avenue Small-Cap Value Fund, an investment company registered under the Investment Company Act of 1940, has the right to receive dividends from, and the proceeds from the sale of 164,200 of the shares reported by EQSF; and Third Avenue Value Portfolio of the WRL Series Fund, an investment company registered under the Investment company Act of 1940, has the right to receive the dividends from, and the proceeds from the sale of 51,100 of the shares reported by EQSF. Various clients for whom MJWA acts as investment advisor have the right to receive dividends from, and the proceeds of the sale of, the shares reported by MJWA.