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Technology Stocks : ASML Holding NV -- Ignore unavailable to you. Want to Upgrade?

To: Maurice S. Green who wrote (495)	11/10/1998 12:22:00 PM
From: Artslaw	Read Replies (1) \| Respond to of 42414

The "illuminator" is unrelated to the laser source: Another improvement is the AERIAL II™ high-transmission illuminator, developed by ASML and Carl Zeiss. AERIAL II provides much higher transmission of 248 nm wavelength light. This plays an essential role in achieving the system's high throughput of 104 200 mm wafers per hour. It's the Cymer (or maybe Komatsu or Lambda Physick) laser which is generating that 248 nm light. The illuminator "increases the uniformity and establishes the angular distribution of the light incident on the reticle." This comes right out of a technical paper at asml.com Steve