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To: brent gephart who wrote (7048)	11/23/1998 7:22:00 PM
From: Starlight	Respond to of 9695

Brent & all - I just got a new SAL newsletter today. The whole newsletter is about XRL being ready for manufacturing insertion. Here is one paragraph from an article titled "XRL Is Ready For Manufacturing Insertion!": X-ray lithography has been used in R&D, process development, and pilot production. It is the only lithography technology that has demonstrated its capability to produce complete semiconductor devices with acceptable yields. With a large process window and simple technology, XRL has a major economic advantage. X-ray masks are approaching commercialization. XRL issues are well known, understood, and are manufacturing insertion issues. International Sematech and ASET are funding efforts to address the few remaining issues. XRL's cost effectiveness, availability, and extendibility combine to make it clearly the best candidate to succeed optical lithography. In another article, SAL mentions that they have recently announced the XRS 2000(TM) NanoPulsar(TM) system, a 130 nm point source stepper upgradeable to 100 nm ground rules. I don't know if I can get my scanner to work, so I may not be able to scan the entire articles. (Tim, do you have a scanner?) Betty