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To: Short A. Few who wrote (3257)12/5/1998 9:59:00 AM
From: Mr. Sam  Read Replies (1) | Respond to of 3736
 
<<Can you say if INTC applies this to dual
doped (p and n-type) poly? And is Ti
salicide formed afterwards?>>

Short, poly polishing is performed on all of the poly (prior to poly mask and etch). Silicidation is done after the polishing.

Note, I'm discussing poly polishing in general. I don't work at INTC. So, generally speaking, the silicidation could form tungsten, titantium, or cobalt silicide.

Mr. Sam


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