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To: Falstaff who wrote (7093)12/2/1998 9:25:00 AM
From: X-Ray Man  Read Replies (1) | Respond to of 9695
 
I disagree with your last comment. While I am very confidant that
XRL will become a commercial tool using point sources, I also believe
that there will be multiple technologies living side-by-side, even
the existing older UV and DUV will continue to exist for those
applications that don't require the new tools. They are just so
much cheaper and better understood.

JMO



To: Falstaff who wrote (7093)12/2/1998 9:32:00 PM
From: Richaaard  Read Replies (1) | Respond to of 9695
 
I think most would agree that XRL is clearly the next step, but everything I've read tells me that it may have a short life as the "winner". I think Intel and others are hoping to extend the life of DUV to cover that interim time frame, and then jump to EUV. XRL will probably have a long life but its superiority could last only a few years.

Richard


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