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To: timwa who wrote (7199)	12/17/1998 7:36:00 PM
From: Starlight	Read Replies (1) \| Respond to of 9695

Tim - Note this paragraph in the article: The Sematech workshop lithography vote may have little immediate impact on any of the four candidate systems. Each of the contenders is still well-financed by industry sponsors -- an Intel-led group for EUV, Lucent Technologies for Scalpel, IBM for x-ray and Siemens and European patrons on ion-beam projection. Few of these champions are expected to back off, regardless of the workshop vote, although some sources felt the financially-pressed Siemens Semiconductor Group may begin to have second thoughts on continued heavy investment in ion-beam projection. Betty