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To: FJB who wrote (20472)12/18/1998 9:33:00 AM
From: Zeev Hed  Read Replies (2) | Respond to of 25960
 
Robert, I do not see why not in principle. The "Proximity X-Ray Lithography system contemplates using as an X-Ray source the synchrotron radiation from an Electron Storage ring (one of the electron sources for FEL, the other is typically a linac (linear accelerator). The tunability of an FEL is not required for lithography, thus a fixed electron source and a fixed wigler tuned to let say 50 to 100 nm should be a much lower cost systems then the experimental FEL now in the field. I would guess that a light source selling for under a million bucks could be done and it would be competitive with most of the current schemes contemplated. The question of appropriate masks will still remain a critical element, but that is the same story with any post photonic based lithography system. Since the FEL is contemplated as a very high energy system (some even for :defense applications, I believe), energy should not be the limiting factor.

Zeev



To: FJB who wrote (20472)12/18/1998 4:30:00 PM
From: BillyG  Respond to of 25960
 
Matsushita, Mitsubishi to collaborate on 0.15-micron technology
eet.com

By Yoshiko Hara
EE Times
(12/18/98, 2:22 p.m. EDT)

TOKYO — Matsushita and Mitsubishi have become R&D partners for the
next generation of system-on-a-chip designs with an agreement to share
R&D costs and exchange technologies.

Under the five-year agreement, Matsushita Electric Industrial Co. Ltd., its
Matsushita Electronics Corp. subsidiary, and Mitsubishi Electric Corp. will
work together to develop 0.15-micron process technology as an initial target,
then 0.13-micron technology as a next step.

“Matsushita is strong in logic, while Mitsubishi is strong in DRAM and
embedded DRAM technologies,” said Susumu Koike, director of
Matsushita's corporate semiconductor development division. “The two
companies have complementary expertise, which are the basis for this joint
plan.”

By developing a common process technology, the companies will be able to
make a flexible production plan and will also be able to serve as second
sources for each other. “The process of the two companies is about 80
percent [similar],” said Koichi Nagasawa, general manager of semiconductor
group at Mitsubishi. “So we could find mutual concession for the remaining
disaccords.” Matsushita operates semiconductor laboratories in Kyoto and
Mitsubishi has laboratories close by in Itami.

The companies will invest about $430 million and plan to assign about 100
engineers to the joint R&D effort, the cost of which will be shared evenly.


The collaboration may expand into some form of joint production in the
future.

Matsushita and Mitsubishi plan to introduce parts in 0.15-micron technology
in 2000, at which point they hope to be ahead of competitors. They plan to
establish volume production of 0.13-micron technology by the end of 2001.

“In this harsh semiconductor environment, Japanese manufacturers have to
take some action such as alliance and merger,"
said Michito Kimura,
semiconductor analyst at IDC Japan. "But before the alliance for the two
generation ahead, more practical measures for current and near future
generation SOCs [systems-on-a-chip] may be needed to improve [the current
market's] price competition, even for SOCs.”