To: Fortinwit who wrote (27345 ) 12/21/1998 9:13:00 PM From: Jeffrey D Respond to of 70976
Fort:<<and FSII missed badly >> Fort, believe the book to bill numbers for FSII. Here is an article today confirming a large order for them. Jeff << Shipley Company Purchases Two FSI International Polaris Microlithography Clusters -------------------------------------------------------------------------------- MINNEAPOLIS (Dec. 21) BUSINESS WIRE -Dec. 21, 1998--FSI International announced today that the Shipley Company has ordered two POLARIS(R) Microlithography Clusters that will be installed in its Fab 2 and 3 research and development facilities in Marlborough, Mass. One system will be used for DUV processes and the other for i-line processes. Shipley, an electronic chemical supplier and resist manufacturer, selected the POLARIS Clusters as an aid in developing 193-nm resists and future resist technologies. The systems will ship in the second half of fiscal 1999. "Key in the selection of the tool are the system's flexibility, thermal technology and multiple processing capabilities," said a spokesperson for Shipley Company. The POLARIS Cluster, which typically sells for between $1.5 and $2.5 million, is an advanced photoresist processing system that provides system flexibility, reliability and other performance advantages. Unlike track systems that use multiple handlers, the POLARIS Cluster consists of independent modules arranged around a cleanroom robot. Each module is totally independent and requires no mechanical interface. The FSI Microlithography Division supplies photoresist processing equipment and services that meet the full range of needs for the semiconductor, thin-film head and multi-chip module markets. In addition to the POLARIS Microlithography Cluster, the Division manufactures the OrbiTrak(R) and SCORPIO(TM) Microlithography Clusters. The Division has design and manufacturing facilities in Allen, Texas, and Fremont, Calif. FSI International, Inc. is a leading global supplier of processing equipment used at key production steps to manufacture microelectronics. The company develops, manufactures, markets and supports products used in the technology areas of microlithography, surface conditioning and chemical management. FSI International's customers include microelectronics manufacturers located throughout North America, Europe, Japan and the Asia-Pacific region. >>