To: Justa Werkenstiff who wrote (27782 ) 1/19/1999 8:55:00 AM From: miklosh Respond to of 70976
AMD Buys Multiple Producer Systems From Applied Materialsbiz.yahoo.com 'Producer is a Breakthrough Concept in System Technology and Productivity,' says AMD SANTA CLARA, Calif.--(BUSINESS WIRE)--Jan. 19, 1999--Advanced Micro Devices (AMD) has ordered multiple units of Applied Materials' new Producerâ„¢ system for its fab in Dresden, Germany, as well as a system for its Submicron Development Center (SDC) in Sunnyvale, California. Producer, an ultrahigh productivity system for depositing advanced-generation blanket dielectric films, uses a revolutionary new platform architecture with Twin Chamberâ„¢ modules to achieve very high wafer throughput. Jack Saltich, vice president and general manager, AMD Saxony Manufacturing GmbH, said, ''The Producer's design establishes a new direction of greater simplicity in process equipment. The system's footprint, coupled with its very efficient hook-up capability, allows for a savings in both expensive fab floorspace and tool installation costs. We plan to use Producer for numerous CVD applications, including anti-reflective coatings, etchstop, passivation and interconnects in our advanced microprocessors, as well as other devices.'' Producer uses Applied Materials' market-leading multi-chamber architecture in a new design that transfers wafers in pairs to process modules; each module has two identical chambers that use common vacuum and gas delivery subsystems. For high reliability, Producer's chambers are extensions of the production-proven hardware and process technology found in Applied Materials' industry-leading CVD (chemical vapor deposition) products. Producer is currently offered for plasma-enhanced CVD (PECVD) applications using TEOS (tetraethylorthosilicate), silane oxide, silane nitride chemistries. The system also features the company's unique Remote Plasma Clean technology, which significantly reduces the frequency of chamber cleans and virtually eliminates global-warming perfluorocompound (PFC) emissions. ''AMD was extremely helpful during the development of Producer, providing a tough, real-world environment for our process transfer and productivity evaluations,'' noted Kevin Fairbairn, general manager of Applied Materials' PECVD Product Division. ''We are delighted that this cooperation has led to AMD's qualification of the Producer, which is now targeted for use in their most advanced production fab, in Germany, and their process development facility in California.''