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Technology Stocks : Cymer (CYMI) -- Ignore unavailable to you. Want to Upgrade?

To: TI2, TechInvestorToo who wrote (20709)	1/27/1999 2:05:00 PM
From: Im-patient	Read Replies (1) \| Respond to of 25960

Thought I'd note this here for more knowledgable persons to comment... PATENT No: 5863017 ISSUE DATE: Jan-26-1999 Stabilized laser platform and module interface ASSIGNEE: Cymer, Inc. San Diego, CA INVENTOR: Larson; Donald Glenn San Diego, CA deRuyter; Anthony John San Diego, CA Mixon; Curtiss Lynn Encinitas, CA Gerent; Jerry Rudy Vista, CA OTHER DETAILS: Legal Rep: Power; David J. Application Date: Jan-05-1996 Application Number: 583380 Primary Examiner: Ramirez; Ramon O. ABSTRACT: A laser system support structure is provided having an independent, kinematically mounted chamber and optics platform. Swivel-type mounts are used to couple the platform at three points to the laser support frame, thereby allowing the platform to remain static while the support frame, via the swivel mounts, deflects around the platform in response to external forces. The independent platform design provides secondary benefits of creating a compartmentalization of laser system components, leading to a modular type design. Each laser system module is mounted to the support structure on an extension rail, to allow removal of the module from the support frame for easy access during servicing.