To: orkrious who wrote (1945 ) 1/31/1999 11:33:00 AM From: FJB Read Replies (1) | Respond to
Cymer had abandoned their F2 program, because few in the industry thought F2 was a workable solution even in mid-98. Currently, SVGL is the only company capable of building an F2 scanner, because it requires a catadioptric lens design. Of the four major lithography vendors, only SVGL is building scanners using such a design. Work at Lincoln Laboratories has indicated F2 lithography is feasible. With SVGL touting their technology, other stepper companies are also beginning or growing interested in R&D work on F2, but SVGL clearly has the lead with their experience in the required optics. I believe this has sparked interest at Cymer in F2 lasers again and they have probably restarted R&D work on those lasers. Cymer is presenting a paper on F2 lasers at the SPIE Microlithography conference in March. After I read the paper, I'll be able to tell you more about the status of Cymer's F2 program and their thoughts on the technology.Revisiting F2 laser for DUV microlithography, T. Hofmann, J. M. Hueber, P. P. Das, S. Scholler, Cymer, Inc. [3679-49]
