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To: timwa who wrote (7441)2/12/1999 1:04:00 PM
From: X-Ray Man  Respond to of 9695
 
EUV - 100-1000 eV
soft xray - 500-3000 eV
hard xray - 2000-100000 eV

approximately

EUV and soft xray overlap, although WRT lithography,
generally EUV is in 100s of eV and soft xray is 1000-2000 eV.