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To: EL KABONG!!! who wrote (7458)	2/14/1999 2:26:00 PM
From: Piper	Read Replies (1) \| Respond to of 9695

I got this from this site: xraylitho.com Is this old news or has this not been discovered? Latest News SAL, Inc. Announces the XRS 2000™ NanoPulsar™ System South Burlington, Vermont - SAL, Inc. announced today the availability of the XRS 2000™ NanoPulsar™ System. This fully integrated x-ray stepper and x-ray point source system features resolution and CD control for 130 nm design rules. The NanoPulsar™ point source uses revolutionary solid-state switching technology to reliably transfer high-energy pulses of 1 nm x-rays. Unlike the point sources developed in the 1980's, the NanoPulsar™ is small, reliable, easy to operate, and easy to maintain. The XRS 2000™ NanoPulsar™ System will be used for patterning of high-speed, high frequency devices such as those used in GaAs communications industry. The system is designed for throughput of twenty 100mm wafers or ten 150 mm wafers per hour. Because the point source, NanoPulsar™, and synchrotron source provide the same wavelength, the XRS 2000™ stepper can be used with either. The XRS 2000™ NanoPulsar™ System can be used to develop x-ray lithography processes and products (without purchasing and installing a synchrotron). The same stepper can be used with a synchrotron for high-volume production—with no process change.