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To: Rob C. who wrote (21239)	3/2/1999 7:26:00 PM
From: BillyG	Read Replies (2) \| Respond to of 25960

Hyundai orders multiple ASML step and scan systems for DUV processing in its Eugene, OR fab...... semibiznews.com A service of Semiconductor Business News, CMP Media Inc. Story posted 4 p.m. EST/1 p.m. PST, 3/2/99 Hyundai orders ASML step-and-scan systems for U.S. fab By Jack Robertson VELDHOVEN, The Netherlands -- ASM Lithography Holding N.V. today confirmed that Hyundai Semiconductor America has ordered multiple deep-UV step-and-scan systems for its Eugene, Ore., fab. Installation of the 0.18-micron-design-rule tools will begin at the fab this month. It was reported previously by SBN that Hyundai had selected ASML as its major lithography vendor for both its Korean and Eugene fabs (see Sept. 23, 1997, story). Soon Y. Hwang, semiconductor director of strategic development for Hyundai in Seoul, said last week that Eugene fab was being equipped with 0.18-micron-capable tools. He said the ASML scanners would later be installed at the company's leading-edge Fab 7 in Ichon, Korea. ASML is also a major supplier to Samsung Electronics in both its Korean and Austin, Tex., fabs. Hyundai paid $10 million to SVG Lithography, of Wilton, Conn., in a joint development project for a 193-nm step-and-scan system. However, Hwang said he wasn't sure when Hyundai would take delivery of the SVGL Micrascan 193-nm system now going into production. Four other companies-- IBM, Intel, Motorola and Samsung -- also paid $10 million each in the SVGL 193-nm development.