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To: Jong Hyun Yoo who wrote (2660)3/18/1999 9:29:00 PM
From: Duker  Respond to of 5867
 
Thanks for the clarification ... I never remember which is metal and which is not ... I have to have my notes in front of me ... which is pretty sad ... it is as much familiarity as anything else ... it is not like being able to differentiate between an ML430 or an ML320 ... I don't see too many 9100PTXs in the parking lot on the way to work!

CMP is really getting ugly for SFAM/IPEC ...

--Duker



To: Jong Hyun Yoo who wrote (2660)3/18/1999 9:36:00 PM
From: Duker  Read Replies (2) | Respond to of 5867
 
JHY,

What is the technical hurdle/tradeoff in terms of improving photoresist selectivity??? Is the IPS better at higher pressures??? What is the pressure/etch rate/plasma density trade-off???

If you get a chance ...

... While you are at it, could you explain the meaning of life, also? <g>

--Duker