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To: timwa who wrote (7707)4/2/1999 12:55:00 AM
From: timwa  Read Replies (1) | Respond to of 9695
 
Check out this article\interview with Richard Foster from PhotonicsOnline.com.
news.photonicsonline.com

This passage provides some insight into the significance of the press release.

Foster has hopes for other application areas of soft x-ray radiation, including high-resolution 3-D x-ray imaging of semiconductor devices, high-resolution surface analysis by x-ray fluorescence, 3-D nanofabrication and radiobiology of DNA in life sciences. "For production lithography, you have to put multiple modules together to get enough power, but one module is sufficient for the above applications," he notes.